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Journal of Applied Physics

Volumn 88, Issue 3, 2000, Pages 1688-1694

An elastic/plastic analysis of the intrinsic stresses in chemical vapor deposited diamond films on silicon substrates

(4) Yu, Jin a Kim, J G b Chung, J O c Cho, D H a

a Korea Advanced Institute of Science and Technology (KAIST) (South Korea)

b Hynix Semiconductor Inc (South Korea)

c Sunchon National University (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0010765798 PISSN: 00218979 EISSN: None Source Type: Journal
DOI: 10.1063/1.373873 Document Type: Article

Times cited : (16)

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