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Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 175-177, Issue , 2001, Pages 442-447

Germanium implantation into amorphous carbon films

(2) Jacobsohn, L G a Freire, Jr b

a FLUMINENSE FEDERAL UNIVERSITY (Brazil)

b PONTIFICAL CATHOLIC UNIVERSITY OF RIO DE JANEIRO (Brazil)

Author keywords

Amorphous carbon; Atomic force microscopy; Friction; Germanium; Ion implantation

Indexed keywords

AMORPHOUS FILMS; ATOMIC FORCE MICROSCOPY; CARBON; FRICTION; GERMANIUM; GRAPHITIZATION; RUTHERFORD BACKSCATTERING SPECTROSCOPY; SURFACE ROUGHNESS; SURFACE TREATMENT;

CARBON FILMS;

ION IMPLANTATION;

EID: 0035302617 PISSN: 0168583X EISSN: None Source Type: Journal
DOI: 10.1016/S0168-583X(00)00565-6 Document Type: Conference Paper

Times cited : (5)

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