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Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 122, Issue 4, 1997, Pages 643-649

Modification of nanometer scale wear of nitrogen-containing carbon films due to ion implantation

(6) Miyake, Shojiro a Watanabe, Shuichi a Miyazawa, Hajime a Murakawa, Masao a Miyamoto, Takanori b Kaneko, Reizo c

a NIPPON INSTITUTE OF TECHNOLOGY (Japan)

b NTT CORPORATION (Japan)

c WAKAYAMA UNIVERSITY (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

DOPING (ADDITIVES); FILMS; ION IMPLANTATION; IONS; MODIFICATION; NANOTECHNOLOGY; NITROGEN; WEAR OF MATERIALS;

MICROWEAR RESISTANCE;

CARBON;

EID: 0031099110 PISSN: 0168583X EISSN: None Source Type: Journal
DOI: 10.1016/S0168-583X(96)00924-X Document Type: Article

Times cited : (17)

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