Deposition and properties of germanium/carbon films deposited from tetramethylgermanium in a parallel plate RF discharge

Thin Solid Films

Volumn 322, Issue 1-2, 1998, Pages 123-131

  Gazicki, M ^a   Ledzion, R ^a   Mazurczyk, R ^a   Pawlowski S ^b  

^a CENTRE OF MOLECULAR AND MACROMOLECULAR STUDIES   (Poland)

^b UNIVERSITY OF LODZ   (Poland)

Author keywords

Germanium carbon films; Glow discharge; Organometallic vapour deposition; Tetramethylgermanium

Indexed keywords

CARBON; CONDUCTIVE FILMS; DECOMPOSITION; ELECTRIC CONDUCTIVITY OF SOLIDS; FILM PREPARATION; FOURIER TRANSFORM INFRARED SPECTROSCOPY; GERMANIUM; REFRACTIVE INDEX; THIN FILMS; VAPOR DEPOSITION;

OPTICAL GAP; TETRAMETHYLGERMANIUM;

OPTICAL FILMS;

EID: 0032496487     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(97)00908-5     Document Type: Article

References (28)

1. R.K. Sadhir, W.J. James, R.A. Auerbach, J. Appl. Polym. Sci.: Appl. Polym. Symp. 38 (1984) 99.
2. R.K. Sadhir, H.E. Saunders, A.W. Byers, Polym. Eng. Sci. 33 (1993) 645.
3. M. Gazicki, K. Pirker, R. Schallauer, W. Fallmann, F. Olcaytug, G. Urban, A. Jachimowicz, F. Kohl, Thin Solid Films 187 (1990) 51.
4. M. Gazicki, A. Jachimowicz, R. Schallauer, K. Pirker, W. Fallmann, F. Kohl, F. Olcaytug, G. Urban, J. Appl. Polym. Sci.: Appl. Polym. Symp. 46 (1990) 137.
5. J. Tyczkowski, E. Odrobina, M. Gazicki, F. Olcaytug, J. Non-Cryst. Solids 137-138 (1991) 875.
6. M. Gazicki, H. Szymanowski, J. Tyczkowski, L. Malinovsky, J. Schalko, W. Fallmann, Thin Solid Films 256 (1995) 31.
7. M. Gazicki, M.J. Potrzebowski, J. Tyczkowski, J. Schalko, Thin Solid Films 258 (1995) 10.
8. M. Gazicki, H. Szymanowski, J. Tyczkowski, J. Schalko, F. Olcaytug, J. Vac. Sci. Technol. A 14 (5) (1996) 2835.
9. J. Tyczkowski, P. Kazimierski, E. Odrobina, Surf. Coating Technol. 60 (1993) 609.
10. J. Tyczkowski, P. Kazimierski, J. Phys. 27 (1994) 179.
11. J. Tyczkowski, P. Kazimierski, H. Szymanowski, Thin Solid Films 241 (1994) 291.
12. H. Szymanowski, M. Gazicki, J. Tyczkowski, F. Olcaytug, Surf. Coat. Technol. 74-75 (1995) 183.
13. J. Tyczkowski, B. Pietrzyk, H. Szymanowski, J. Chem. Vap. Depos. 4 (1996) 261.
14. J. Tyczkowski, B. Pietrzyk, Y. Hatanaka, Y. Nakanishi, Appl. Surf. Sci. 113-114 (1997) 534.
15. J. Tyczkowski, H. Szymanowski, R. Mazurczyk, Surf. Coat. Technol., November 1997, in press.
16. J.J. De Ridder, G. Van Koten, G. Dijkstra, Rec. J. R. Neth. Chem. Soc. 86 (1967) 1325.
17. F. Glocking, J.R.C. Light, J. Chem. Soc. A (1968) 717.
18. M. Gazicki, H. Schalko, P. Svasek, F. Olcaytug, F. Kohl, J. Vac. Sci. Technol. A 10 (1992) 51.
19. Z. Klusek, W. Olejniczak, S. Pawłowski, P. Kobierski, SPIE Proc. on the 1st Int. Conf. on Scanning Probe Microscopy as a Microsystem, June 5-7, Krobielowice Palace, Poland, 1997, in press.
20. H. Yasuda, Plasma Polymerization, Academic Press, Orlando, 1985.
21. M. Gazicki, H. Yasuda, J. Appl. Polym. Sci.: Appl. Polym. Symp. 38 (1984) 35.
22. J. Tauc, Amorphous and Liquid Semiconductors, Plenum, New York, 1974, pp. 173-178.
23. N.L. Alpert, W.E. Keiser, H.A. Szymański, IR. Theory and Practice of Infrared Spectroscopy, Chap. 5, Plenum, New York.
24. R.J. Cross, F. Glocking, J. Organomet. Chem. 3 (1965) 146.
25. N. Inagaki, M. Mitsuuchi, J. Polym. Sci.: Polym. Chem. Ed. 21 (1983) 2887.
26. Y. Catherine, G. Turban, Thin Solid Films 60 (1979) 193.
27. M. Cordona, Phys. Status Solidi B 118 (1983) 463.
28. M. Gazicki, H. Szymanowski, J. Schalko, L. Malinovsky, Thin Solid Films 230 (1993) 81.