Structural studies on hydrogenated amorphous germanium-carbon films prepared by RF sputtering

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 37, Issue 4 SUPPL. A, 1998, Pages 1754-1759

  Kumeda, Minoru ^a   Masuda, Akio ^a   Shimizu, Tatsuo ^a  

^a KANAZAWA UNIVERSITY   (Japan)

Author keywords

Alloy film; Dangling bond; ESR; Germanium carbide; Hydrogen

Indexed keywords

CARBON; COMPOSITION EFFECTS; ELECTRON SPIN RESONANCE SPECTROSCOPY; GERMANIUM; HYDROGEN BONDS; HYDROGENATION; MAGNETRON SPUTTERING;

GERMANIUM CARBIDE;

AMORPHOUS FILMS;

EID: 0032049682     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/jjap.37.1754     Document Type: Article

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