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Volumn 31, Issue 2, 2001, Pages 114-117

High spatial resolution extended x-ray emission fine structure (EXEFS) spectra of an electronic device measured by electron probe microanalysis (EPMA)

(2) Kawai, Jun a Takahashi, Hideyuki b

a KYOTO UNIVERSITY (Japan)

b JEOL LTD (Japan)

Author keywords

EPMA; EXEFS; X ray absorption; X ray analysis; XANES

Indexed keywords

X-RAY EMISSION FINE STRUCTURE (EXEFS) SPECTRA;

CRYSTAL STRUCTURE; MICROANALYSIS; MULTILAYERS; OPTICAL RESOLVING POWER; X RAY ANALYSIS; X RAY PHOTOELECTRON SPECTROSCOPY;

SURFACE CHEMISTRY;

EID: 0035248114 PISSN: 01422421 EISSN: None Source Type: Journal
DOI: 10.1002/sia.965 Document Type: Article

Times cited : (6)

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