Polarization profile of RF-sputtered self-polarized PZT thin films

Integrated Ferroelectrics

Volumn 32, Issue 1-4, 2001, Pages 169-177

  Suchaneck, G ^a   Koehler, R ^a   Sandner, T ^a   Gerlach, G ^a   Deineka, A ^a   Jastrabik, L ^a   Kosarev, A I ^a   Andronov, N ^a  

^a DRESDEN UNIVERSITY OF TECHNOLOGY   (Germany)

Author keywords

Electrode interaction; Interface layer; Self polarization

Indexed keywords

CAPACITANCE MEASUREMENT; ELECTRON BEAMS; ELLIPSOMETRY; GRAPHITE ELECTRODES; INTERFACES (MATERIALS); LASER APPLICATIONS; LIGHT POLARIZATION; POINT DEFECTS; REFRACTIVE INDEX; SPUTTER DEPOSITION;

ANDERSON METHOD; LASER INTENSITY MODULATION METHOD; LEAD TITANATE ZIRCONATE; SPACE CHARGE DENSITY;

FERROELECTRIC THIN FILMS;

EID: 0035034954     PISSN: 10584587     EISSN: None     Source Type: Journal    
DOI: 10.1080/10584580108215688     Document Type: Conference Paper

References (29)