Influence of surface and interface on PZT film optical properties

Physica Status Solidi (A) Applied Research

Volumn 175, Issue 1, 1999, Pages 443-446

  Deineka, A ^a   Glinchuk, M ^b   Jastrabik, L ^a   Suchaneck, G ^c   Gerlach, G ^c  

^a INSTITUTE OF PHYSICS   (Czech Republic)

^b FRANTSEVICH INSTITUTE FOR PROBLEMS OF MATERIALS SCIENCE   (Ukraine)

^c DRESDEN UNIVERSITY OF TECHNOLOGY   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ELLIPSOMETRY; FERROELECTRIC MATERIALS; INTERFACES (MATERIALS); LEAD COMPOUNDS; PLATINUM; REFRACTIVE INDEX; SILICA; SPECTROSCOPIC ANALYSIS; SPUTTERING; SUBSTRATES; THIN FILMS;

SPECTROELLIPSOMETRIC METHODS;

DIELECTRIC FILMS;

EID: 0032594810     PISSN: 00318965     EISSN: None     Source Type: Journal    
DOI: 10.1002/(SICI)1521-396X(199909)175:1<443::AID-PSSA443>3.0.CO;2-M     Document Type: Article

References (10)

1. F. P. GNADINGER, IEEE VLSI and Computer Peripherals 1, 20 (1989).
2. D. BONDURANT and F. GNADINGER, IEEE Spectr. 7, 30 (1989).
3. G. SUCHANECK, T. SANDNER, R. KOEHLER, P. PADMINI, G. GERLACH, V. P. AFANASJEV, and E. V. TARAKANOV, ECAPD IV '98/ISAF XI '98/Electroceramics VI '98. Abstract Book, EPFL, Montreux 1998.
4. R. M. A. AZZAM and N. M. BASHARA, Ellipsometry and Polarized Light, North-Holland Publ. Co., Amsterdam 1977.
5. B.G. POTTER JR., M. B. SINCLAIR, and D. DIMOS, Appl. Phys. Lett. 63, 2180 (1993).
6. F. ABELES, Nat. Bur. Stand. 256, 41 (1963).
7. V. I. PSHENITSIN, M. I. ABAEV, and N. YU. LYZLOV, Ellipsometry in Physico-Chemistry Investigations, Chemistry, Leningrad (St. Petersburg) 1986.
8. J. RIVORY, Thin Solid Films 313-314, 333 (1998)
9. D. E. ASPNES, SPIE Proc. 276, 188 (1981).
10. M. F. DEIGEN and M. D. GLINCHUK, Surf. Sci. 3, 243 (1965).