Ultrasonic transmission and reception from bulk-micromachined transducers

IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control

Volumn 48, Issue 1, 2001, Pages 224-231

  Harris, Paul D ^a   Andrews, Michael K ^a   Turner, Gary C ^a  

^a CALLAGHAN INNOVATION   (New Zealand)

Author keywords

[No Author keywords available]

Indexed keywords

ACOUSTIC TRANSDUCERS; BANDWIDTH; DIAPHRAGMS; INSERTION LOSSES; MICROMACHINING; MICROPHONES; NATURAL FREQUENCIES;

SQUEEZE FILM EFFECTS;

ULTRASONIC TRANSMISSION;

ARTICLE;

EID: 0034745854     PISSN: 08853010     EISSN: None     Source Type: Journal    
DOI: 10.1109/58.896135     Document Type: Article

References (18)

1. W. Manthey, N. Kroemer, and V. Magori, "Ultrasonic transducers and transducer arrays for application in air," Meas. Sci. Teclmol., vol. 3, no. 3, pp. 249-261, 1992.
2. M. I. Hallor and B. T. Khuri-Yakub, "A surface micromacliincd electrostatic ultrasonic air transducer," IEEE Trails. Ultrason., Fc.ri-oalacL, Fre.q. Conir., vol. 43, no. 1, pp. 1-0, 1996.
3. H. Carr and C. Wykcs, "Diagnostic measurements in capacitative transducers," Ultratumics. vol. 31, no. 1, pp. 13-20, 1903.
4. C. Biber, S. Ellin, R. Shenk, and J. Steinpra-k, "The Polaroid ultrasonic ranging system," presented at the 67th Cotiv. Audio Eng. Soc., 1980.
5. P. Maltila and J. Hictanon, "Bandwidth control of an electrostatic ultrasonic transducer," Sens. Ar.tua.tors, vol. A45, no. 3, pp. 203-208, 1934.
6. [fi] M. J. Anderson, J. A. Hill, C. M. Fortunko, N. S. Dogan, and R.. D. Moore, "Broadband electrostatic transducers: Modelling and experiments," ,J. Acuusl. Soc. Amer., vol. 97, no. 1, pp. 262-272, 1995.
7. K. Suzuki, K. Hignchi, and H. Tanigawa, "A silicon ultrasonic transducer," IEEE Trans. Ultrason., Ferroelect., Freq. Cnntr., vol. ,'JH, no. 6, pp. 620 027, 1989.
8. D. W. Schindel, D. A. Hulchins, L. Zou, and M. Sayer, "The design and characterisation of itiicromachinect air-coupled capacitance transducers," IKKE Trims. Ultrason., l''erroKlccl., Fruq. Gftntr., vol. 42, no. 1, pp. 42-50, 1995.
9. I. Ladabaum, X. Jin, II. Soh, A. Atalur, and B. T. Khuri-Yakub, "Surface micromachiiicd ultrasonic transducers," IEEE Trims. Ultrason., Ferroelect., Freq. Cnntr., vol. 45, no. 3, pp. 678-690. 1998.
10. O. Brand, M. Hornuug, H. Baltes, and C. Hafner, "Ultrasound barrier microsystem for object detection based on micromachined transducer elements," J. Microe.lectr. Sys., vol. 6, no. 2, pp. 151-160, 1997.
11. W. Kcuhnel and G. Hess, "A silicon condenser microphone with a structured backplatc aud silicon nitride membrane," Sens. Actuators, vol. A30, no. 3, pp. 251-258, 1992.
12. M. K. Andrews, 1. Harris, and G. C. Turner, "A comparison of squeexe film theory with measurements on a microstrncture," 6'cns. Actuators, vol. 30, no. 1, pp. 79-87, 1993.
13. M. K. Andrews, G. C. Turner, P. D. Harris, and I. M. Harris, "A resonant pressure sensor based on a squeezed film of gas," Sens. Actuators, vol. 30, no. 3, pp. 219 -226, 1993.
14. J. H. Starr, "Squeeze film damping in solid state accelcrometors," in Tc.r.li. Dû/est, IEEE Solid State Sensor Actuator Workshop, Hilton Head Island, SC, 1990, pp. 44-47.
15. J. Blcch, "On isothermal squeeze films," J. Lubr. Te.chnoL, vol. 105, no. 4, pp. 015-620, 1983.
16. G. C. Turner and M. K. Andrews, "Frequency stabilisation of electrostatic oscillators," in Proc. 8th Int. Conf. Solid Stal.e. Sensors and Actuators, vol. 2, Stockholm, Sweden, 1995, pp. 624026.
17. L. E. Kitisler, A. II. lïey, A. B. Coppens, and J, V. Sanders, Fundamentals of Acoustics. Urd ed. New York: John Wiley, 1982, p. 390.
18. 11.J.J. Braddick, VHnulions, Waves, and Diffraction. London: McGmw-Hill, 1905, ch. 2.