A silicon condenser microphone with structured back plate and silicon nitride membrane

Sensors and Actuators: A. Physical

Volumn 30, Issue 3, 1992, Pages 251-258

  Kühnel, Wolfgang ^a   Hess, Gisela ^a  

^a Institut für Übertragungstechnik und Elektroakustik Technische Hochshule Darmstadt Merckstrasse 25 6100 Darmstadt FRG ^*

Author keywords

[No Author keywords available]

Indexed keywords

FABRICATION; MEMBRANES; MICROMACHINING; MICROPHONES; SILICON NITRIDE;

SILICON CONDENSER MICROPHONE;

SENSORS;

EID: 0026820718     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/0924-4247(92)80128-P     Document Type: Article

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