A resonant pressure sensor based on a squeezed film of gas

Sensors and Actuators: A. Physical

Volumn 36, Issue 3, 1993, Pages 219-226

  Andrews, M K ^a   Turner, G C ^a   Harris, P D ^a   Harris, I M ^a  

^a CALLAGHAN INNOVATION   (New Zealand)

Author keywords

[No Author keywords available]

Indexed keywords

CAVITY RESONATORS; GAS DYNAMICS; GASES; INSTRUMENTS; OSCILLATORS (MECHANICAL); PRESSURE EFFECTS; PRESSURE MEASUREMENT; PRESSURE TRANSDUCERS;

GAS SPRING CONSTANT; RESONATE PRESSURE SENSORS; SQUEEZE FILM EFFECT; SQUEEZED GAS FILMS;

RESONATORS;

EID: 0027593470     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/0924-4247(93)80196-N     Document Type: Article

References (12)

1. Etched vibrating sensor
2. Capacitively activated torsional high-Q resonator
3. Silicon pressure sensor integrates resonant strain gauge on diaphragm
4. A capacitively excited and detected resonant pressure sensor with temperature compensation
5. Laterally driven polysilicon resonant microstructures
6. A comparison of squeeze film theory with measurements on a microstructure
7. Capacitive silicon accelerometer with highly symmetric design
8. Compressible squeeze films and bearings
9. On isothermal squeeze films