Effects of nitrogen ion beam irradiation on a-C and CNx thin films

Japanese Journal of Applied Physics, Part 2: Letters

Volumn 37, Issue 10 SUPPL. B, 1998, Pages

  Jin, Yun Sik ^a   Shibata, Tetsuya ^a   Matsuda, Yoshinobu ^a   Fujiyama, Hiroshi ^a  

^a NAGASAKI UNIVERSITY   (Japan)

Author keywords

Amorphous carbon; Carbon nitride; Ion beam irradiation; Ion implantation; Ion range; Sputter erosion

Indexed keywords

CARBON; CARBON INORGANIC COMPOUNDS; CHEMICAL BONDS; COMPOSITION EFFECTS; EROSION; ION BEAMS; ION BOMBARDMENT; ION IMPLANTATION; NITROGEN; THIN FILMS; X RAY PHOTOELECTRON SPECTROSCOPY;

CARBON NITRIDE; DEPTH PROFILING; SPUTTER EROSION;

AMORPHOUS FILMS;

EID: 0032181015     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/jjap.37.l1260     Document Type: Article

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