Role of piezoceramic microactuation for advanced mobility

IEEE International Symposium on Applications of Ferroelectrics

Volumn 1, Issue , 1996, Pages 205-211

  Thakoor, Sarita ^a   Morookian, John Michael ^a   Cutts, James A ^a  

^a CALIFORNIA INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ACTUATORS; ELECTRODEPOSITION; INTERFEROMETRY; MAGNETOSTRICTION; MEDICAL APPLICATIONS; MICROMACHINING; ROBOTICS; SEMICONDUCTING LEAD COMPOUNDS; SEMICONDUCTOR DEVICE STRUCTURES; SHAPE MEMORY EFFECT; SUBSTRATES; THIN FILMS;

LEAD LANTHANUM ZIRCONATE TITANATE FILMS; PIEZOCERAMIC MICROACTUATORS; POLYMERIC ACTUATORS;

PIEZOELECTRIC MATERIALS;

EID: 0030358680     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (20)