Characterization and application of jet-printed thin PTZ layers for actuation of MEMS

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3242, Issue , 1997, Pages 380-387

  Schroth, Andreas ^a   Ichiki, Masaaki ^a   Maeda, Ryutaro ^a   Akedo, Jun ^a  

^a NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY AIST   (Japan)

Author keywords

Actuation; FEM; Jet printing; Piezoelectric; PZT; Thermal stress; Thin layer

Indexed keywords

ACTUATORS; APPLICATIONS; DEFORMATION; ELECTROMECHANICAL DEVICES; FINITE ELEMENT METHOD; JETS; MEMS; MICROELECTROMECHANICAL DEVICES; MICROOPTICS; PIEZOELECTRIC MATERIALS; PIEZOELECTRIC TRANSDUCERS; PIEZOELECTRICITY; PRINTING; PRINTING PROPERTIES; SEMICONDUCTING LEAD COMPOUNDS; STRENGTH OF MATERIALS; THERMAL STRESS; THERMOELASTICITY;

ACTUATION; FEM; PIEZOELECTRIC; PZT; THIN LAYER;

PIEZOELECTRIC ACTUATORS;

EID: 0000557998     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.293560     Document Type: Conference Paper

References (8)

1. O. Auciello and R. Ramesh (ed.), "Electroceramic Thin Films Part 1: Processing", MRS Bulletin /June 1996, pp. 21-58, 1996.
2. J. Akedo, M. Ichiki, K. Kikuchi, and R. Maeda: "Fabrication of Three Dimensional Micro Structure Composed of Different Materials Using Excimer Laser Ablation and Jet Molding", Proceedings of MEMS 97, Nagoya, January 26-30, pp. 135-140, 1997.
3. J. Akedo, M. Ichiki, K. Kikuchi, and R. Maeda: "New Molding Technique Using Ultra-Fine Particles for Realization of Three Dimensional Micro Structure", T.IEE Japan, Vol. 117-E, No. 8 (1997), pp. 432-433, 1997.
4. M. Ichiki, J. Akedo, A. Schroth, R. Maeda, and Y. Ishikawa: "X-ray Diffraction and Scanning Electron Microscopy Observation of Lead Zirconate Titanate Thick Film Formed by Gas Deposition Method", Jpn. J. Apl. Phys., 9B, Vol. 36, in print, 1997.
5. H. Adachi, Y. Kuroda, T. Imahashi, and K. Yanagisawa: "Preparation of Piezoelectric Thick Film using a Jet Printing System", Jpn. J. Apl. Phys., Parti, No. 3A, March 1997, Vol. 36, pp. 1159-1163, 1997
6. A. Schroth: "Methods of Description and Models for the Behaviour of Beams or Plates as Mechanical Transducer Elements in Micromechanics", Thesis, Dresden University of Technology, Germany (in German), 1996.
7. H. Schaumburg (ed.): "Sensoren", B. G. Teubner, Stuttgart, (in German), 1992.
8. C. Lee: "Piezoelectric PZT Thin Film Synthesized by Sol-gel Method and Its Application to Micromachined Force Sensors for Scanning Force Microscope", Ph. D. Thesis, The University of Tokyo, Japan, 1996.