Thin/thick piezoelectric films by electrophoretic deposition

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3324, Issue , 1998, Pages 14-19

  Van Tassel, J ^a   Randall, C A ^a  

^a PENNSYLVANIA STATE UNIVERSITY   (United States)

Author keywords

Electrophoretic Deposition; Piezoelectric Films; PZT; Thin Thick Films

Indexed keywords

ALUMINA; ELECTRIC FIELD EFFECTS; ELECTROCHEMICAL ELECTRODES; ELECTRODEPOSITION; ELECTROPHORESIS; FILM PREPARATION; PERMITTIVITY; SEMICONDUCTING LEAD COMPOUNDS; SINTERING;

PIEZOELECTRIC FILMS;

PIEZOELECTRIC MATERIALS;

EID: 0032401296     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.316863     Document Type: Conference Paper

References (7)

1. Electrophoretic deposition (EPD): Mechanisms, kinetics, and application to ceramics
2. Electrophoretic deposition - A review
3. Measurement of effective longitudinal piezoelectric coefficient of thin films by direct piezoelectric effect
4. Electrostrictive properties of the lead zirconate titanate solid solution system
5. High temperature discharges in ferroelectric ceramics
6. Electrophoretic deposition of PZT ceramic films