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Volumn 284-285, Issue , 1996, Pages 261-266

In-situ FTIR studies of the kinetics and self assembly of alkyl and perfluoroalkyl trichlorosilanes on silicon

Author keywords

Fourier transform infrared spectroscopy; Self assembly; Silicon; Trichlorosilanes

Indexed keywords

ADSORPTION; ATOMIC FORCE MICROSCOPY; FOURIER TRANSFORM INFRARED SPECTROSCOPY; GIBBS FREE ENERGY; REACTION KINETICS; SEMICONDUCTING SILICON; SUBSTRATES; SURFACE ACTIVE AGENTS; X RAY DIFFRACTION ANALYSIS;

EID: 0030233341     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(95)08319-7     Document Type: Article
Times cited : (16)

References (42)


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.