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Volumn 284-285, Issue , 1996, Pages 261-266
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In-situ FTIR studies of the kinetics and self assembly of alkyl and perfluoroalkyl trichlorosilanes on silicon
a a b b b |
Author keywords
Fourier transform infrared spectroscopy; Self assembly; Silicon; Trichlorosilanes
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Indexed keywords
ADSORPTION;
ATOMIC FORCE MICROSCOPY;
FOURIER TRANSFORM INFRARED SPECTROSCOPY;
GIBBS FREE ENERGY;
REACTION KINETICS;
SEMICONDUCTING SILICON;
SUBSTRATES;
SURFACE ACTIVE AGENTS;
X RAY DIFFRACTION ANALYSIS;
ALKYL MOLECULES;
OCTADECYLTRICHLOROSILANE (OTS);
PERFLUOROALKYL TRICHLOROSILANE MOLECULES;
SILICON ATTENUATED TOTAL REFLECTION PRISMS;
SILANES;
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EID: 0030233341
PISSN: 00406090
EISSN: None
Source Type: Journal
DOI: 10.1016/S0040-6090(95)08319-7 Document Type: Article |
Times cited : (16)
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References (42)
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