Sub-femtofarad capacitive sensing for microfabricated transducers using correlated double sampling and delta modulation

IEEE Transactions on Circuits and Systems II: Analog and Digital Signal Processing

Volumn 47, Issue 11, 2000, Pages 1170-1176

  Ranganathan, Sumant ^a   Inerfield, Michael ^b   Roy, Shuvo ^c   Garverick, Steven L ^a,d  

^a CASE WESTERN RESERVE UNIVERSITY   (United States)

^b BROADCOM CORPORATION   (United States)

^c Case Western Reserve University   (United States)

^d LERNER RESEARCH INSTITUTE   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ACCELEROMETERS; APPLICATION SPECIFIC INTEGRATED CIRCUITS; CAPACITANCE MEASUREMENT; CORRELATION DETECTORS; DELTA MODULATION; DESIGN FOR TESTABILITY; ELECTRIC CHARGE MEASUREMENT; LINEAR NETWORK ANALYSIS; MICROELECTRONIC PROCESSING; MICROSENSORS; MODULATORS; PRESSURE MEASUREMENT;

CAPACITIVE SENSOR; CORRELATED DOUBLE SAMPLING; DELTA MODULATOR; PRESSURE SENSORS;

TRANSDUCERS;

EID: 0034315948     PISSN: 10577130     EISSN: None     Source Type: Journal    
DOI: 10.1109/82.885125     Document Type: Article

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