A Digital Readout Technique for Capacitive Sensor Applications

IEEE Journal of Solid-State Circuits

Volumn 23, Issue 4, 1988, Pages 972-977

  Kung, Joseph T ^a   Lee, Hae Seung ^a   Howe, Roger T ^a  

^a MASSACHUSETTS INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CONTROL SYSTEMS, DIGITAL; DATA CONVERSION, DIGITAL TO ANALOG -- MATHEMATICAL MODELS; ELECTRIC MEASUREMENTS -- CAPACITANCE; SEMICONDUCTOR DEVICES, MOS -- SWITCHING; SENSORS -- MEASUREMENTS;

CAPACITIVE SENSOR; CHARGE REDISTRIBUTION TECHNIQUE; COMPLEMENTARY MOS (CMOS); MOS SWITCHCHARGE INJECTION EFFECT;

INSTRUMENTS, DIGITAL;

EID: 0024057437     PISSN: 00189200     EISSN: 1558173X     Source Type: Journal    
DOI: 10.1109/4.348     Document Type: Article

References (13)

1. M. A. Schmidt, R. T. Howe, S. D. Senturia, and J. H. Haritonidis, “A micromachined floating-element shear sensor,” in Tech. Dig., 4th Int. Conf. Solid-state Sensors and Actuators ‘Transducers '87’ ‘Tokyo, Japan’, 1987, pp. 383–386.
2. Y. S. Lee and K. D. Wise, “A batch-fabricated silicon capacitive pressure transducer with low temperature sensitivity,” IEEE Trans. Electron Devices, vol. ED-29, pp. 42–48, Jan. 1982.
3. N. F. Sheppard, D. R. Day, H. L. Lee, and S. D. Senturia, “Microdielectrometry,” Sensors and Actuators, vol. 2, pp. 263–274, 1982.
4. D. R. Harrison and J. Dimeff, “A diode-quad bridge circuit for use with capacitance transducers,” Rev. Sci. Instrum., vol. 44, pp. 1468–1472, Oct. 1973.
5. C. S. Sander, J. W. Knutti, and J. D. Meindl, “A monolithic capacitive pressure transducer with pulse-period output,” IEEE Trans. Electron Devices, vol. ED-27, pp. 927–930, May 1980.
6. K. Watanabe and W. Chung, “A switched-capacitor interface for intelligent capacitive transducers,” IEEE Trans. Instrum. Meas., vol. IM-35, pp. 472–476, Dec. 1986.
7. K. Watanabe and G. C. Temes, “A switched-capacitor digital capacitance bridge,” IEEE Trans. Instrum. Meas., vol. IM-33, pp. 247–251, Dec. 1984.
8. J. L. McCreary and D. A. Sealer, “Precision capacitor ratio measurement technique for integrated circuit capacitor arrays,” IEEE Trans. Instrum. Meas., vol. IM-28, pp. 11–17, Mar. 1979.
9. H. S. Lee, D. A. Hodges, and P. R. Gray, “A self-calibrating 15 bit CMOS A/D converter,” IEEE J. Solid-state Circuits, vol. SC-19, pp. 813–819, Dec. 1984.
10. R. Gregorian and G. C. Temes, Analog MOS Integrated Circuits for Signal Processing, New York: Wiley, 1986.
11. H. Lee and D. A. Hodges, “A precision measurement technique for residual polarization in integrated circuit capacitors,” IEEE Electron Device Lett., vol. EDL-5, pp. 417–420, Oct. 1984.
12. J. Shyu, G. C. Temes, and F. Krummenacher, “Random error effects in matched MOS capacitors and current sources,” IEEE J. Solid-state Circuits, vol. SC-19, pp. 948–955, Dec. 1984.
13. J. Shyu, G. C. Temes, and K. Yao, “Random errors in MOS capacitors,” IEEE J. Solid-state Circuits, vol. SC-17, pp. 1070–1075, Dec. 1982.