An Integrated Airgap-Capacitor Pressure Sensor and Digital Readout with Sub-100 Attofarad Resolution

Journal of Microelectromechanical Systems

Volumn 1, Issue 3, 1992, Pages 121-129

  Kung, Joseph T ^a   Lee, Hae Sueung ^a  

^a MASSACHUSETTS INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0008869311     PISSN: 10577157     EISSN: 19410158     Source Type: Journal    
DOI: 10.1109/84.186391     Document Type: Article

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