Synchrotron X-ray scattering techniques for microelectronics-related materials studies

IBM Journal of Research and Development

Volumn 44, Issue 4, 2000, Pages 457-476

  Jordan Sweet, J L ^a  

^a NONE

Author keywords

[No Author keywords available]

Indexed keywords

MICROELECTRONICS; STRUCTURAL ANALYSIS; SYNCHROTRON RADIATION; X RAY SCATTERING;

SYNCHROTRON X-RAY SCATTERING METHODS;

SYNCHROTRONS;

EID: 0034228218     PISSN: 00188646     EISSN: None     Source Type: Journal    
DOI: 10.1147/rd.444.0457     Document Type: Article

References (67)

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