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Volumn 69, Issue 7, 1996, Pages 975-977

Enhanced formation of the C54 phase of TiSi2 by an interposed layer of molybdenum

Author keywords

[No Author keywords available]

Indexed keywords


EID: 0000065299     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.117100     Document Type: Article
Times cited : (86)

References (15)
  • 11
    • 0000112472 scopus 로고
    • edited by N. G. Einspurch and G. B. Larrabee Academic, New York, Chap. 6
    • M.-A. Nicolet and S. S. Lau, in VLSI Electronics Microstruciure Science, edited by N. G. Einspurch and G. B. Larrabee (Academic, New York, 1983), Vol. 6, Chap. 6.
    • (1983) VLSI Electronics Microstruciure Science , vol.6
    • Nicolet, M.-A.1    Lau, S.S.2
  • 12
    • 85033017845 scopus 로고    scopus 로고
    • JCPDS-International Center for Diffraction Data, PDF-2 Database, 12 Campus Blvd., Newton Square, PA 19073-3273
    • 2]. JCPDS-International Center for Diffraction Data, PDF-2 Database, 12 Campus Blvd., Newton Square, PA 19073-3273.
    • 2]
  • 13
    • 85033011639 scopus 로고    scopus 로고
    • JCPDS-International Center for Diffraction Data, PDF-2 Database, 12 Campus Blvd., Newton Square, PA 19073-3273
    • 2], JCPDS-International Center for Diffraction Data, PDF-2 Database, 12 Campus Blvd., Newton Square, PA 19073-3273.
    • 2]
  • 15
    • 0020248503 scopus 로고
    • edited by C. Dell'Oca and W. M. Bullis The Electrochemical Society, Pennington
    • F. M. d'Heurle, in VLSI Science and Technology, edited by C. Dell'Oca and W. M. Bullis (The Electrochemical Society, Pennington, 1982), pp. 194-212.
    • (1982) VLSI Science and Technology , pp. 194-212
    • D'Heurle, F.M.1


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.