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Physica B: Condensed Matter

Volumn 273-274, Issue , 1999, Pages 608-611

Images of local tilted regions in strain-relaxed SiGe layers

(5) Mooney, P M a Jordan Sweet, J L a Noyan, I C a Kaldor, S K a Wang, P C b

a IBM T J WATSON RESEARCH CENTER (United States)

b IBM MICROELECTRONICS (United States)

Author keywords

[No Author keywords available]

Indexed keywords

DISLOCATIONS (CRYSTALS); LATTICE CONSTANTS; RELAXATION PROCESSES; SEMICONDUCTING SILICON; SEMICONDUCTING SILICON COMPOUNDS; STRAIN; X RAY CRYSTALLOGRAPHY;

LOCAL TILTED REGIONS; MOSAIC STRUCTURE; STRAIN RELAXATION;

SEMICONDUCTING FILMS;

EID: 0033323449 PISSN: 09214526 EISSN: None Source Type: Journal
DOI: 10.1016/S0921-4526(99)00585-2 Document Type: Article

Times cited : (5)

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