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Volumn 16, Issue 2, 2000, Pages 12-18

Another dimension in device characterization: Scanning capacitance microscopy of InP-based laser structures

Author keywords

[No Author keywords available]

Indexed keywords

HETEROJUNCTIONS; SEMICONDUCTING INDIUM PHOSPHIDE;

EID: 0033905913     PISSN: 87553996     EISSN: None     Source Type: Journal    
DOI: 10.1109/101.833030     Document Type: Article
Times cited : (23)

References (11)
  • 1
    • 0029344104 scopus 로고
    • Scanning probe techniques for the electrical characterization of semiconductor devices
    • J.A. Dagata and J.J. Kopanski, "Scanning probe techniques for the electrical characterization of semiconductor devices," Solid State Technol., vol. 38, no. 7, p. 91, 1995.
    • (1995) Solid State Technol. , vol.38 , Issue.7 , pp. 91
    • Dagata, J.A.1    Kopanski, J.J.2
  • 3
    • 0000949577 scopus 로고    scopus 로고
    • Quantitative two-dimensional dopant profiling of abrupt dopant profiles by cross-sectional scanning capacitance microscopy
    • Y. Huang, C.C. Williams, and M. A. Wendman, "Quantitative two-dimensional dopant profiling of abrupt dopant profiles by cross-sectional scanning capacitance microscopy," J. Vac. Sci. Technol., vol. B14, p. 1168, 1996.
    • (1996) J. Vac. Sci. Technol. , vol.B14 , pp. 1168
    • Huang, Y.1    Williams, C.C.2    Wendman, M.A.3
  • 4
    • 0001223938 scopus 로고    scopus 로고
    • Scanning capacitance microscopy measurements and modeling: Progress towards dopant profiling
    • J.J. Kopanski, J. F. Marchiando, and J.R. Lowney, "Scanning capacitance microscopy measurements and modeling: Progress towards dopant profiling," J. Vac. Sci. Technol., vol. B14, p. 242, 1996.
    • (1996) J. Vac. Sci. Technol. , vol.B14 , pp. 242
    • Kopanski, J.J.1    Marchiando, J.F.2    Lowney, J.R.3
  • 7
    • 33747596955 scopus 로고    scopus 로고
    • Buried heterostructure complex-coupled distributed feedback 1.55 μm lasers fabricated using dry etching processes and quaternary layer overgrowth
    • to be published
    • D. Söderström, S. Lourdudoss, C.F. Carlström, S. Anand, M. Kahn, and M. Kamp, "Buried heterostructure complex-coupled distributed feedback 1.55 μm lasers fabricated using dry etching processes and quaternary layer overgrowth," J. Vac. Sci. Technol. B, to be published.
    • J. Vac. Sci. Technol. B
    • Söderström, D.1    Lourdudoss, S.2    Carlström, C.F.3    Anand, S.4    Kahn, M.5    Kamp, M.6
  • 8
    • 0000492270 scopus 로고    scopus 로고
    • Advances in experimental technique for quantitative two-dimensional dopant profiling by scanning capacitance microscopy
    • V.V. Zavyalov, J.S. Murray, and C.C Williams, "Advances in experimental technique for quantitative two-dimensional dopant profiling by scanning capacitance microscopy," Rev. Sci. Instrum. vol. 70, p. 158, 1999.
    • (1999) Rev. Sci. Instrum. , vol.70 , pp. 158
    • Zavyalov, V.V.1    Murray, J.S.2    Williams, C.C.3
  • 9
    • 0032687254 scopus 로고    scopus 로고
    • Scanning capacitance microscopy investigations of buried heterostructure laser structures
    • O. Bowallius, S. Anand, M. Hammar, S. Nilsson, and G. Landgren, "Scanning capacitance microscopy investigations of buried heterostructure laser structures," Appl. Surf. Sci. vol. 145, p. 137, 1999.
    • (1999) Appl. Surf. Sci. , vol.145 , pp. 137
    • Bowallius, O.1    Anand, S.2    Hammar, M.3    Nilsson, S.4    Landgren, G.5


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.