Front-end process simulation

Solid-State Electronics

Volumn 44, Issue 5, 2000, Pages 863-868

  Rafferty, C S ^a  

^a LUCENT TECHNOLOGIES   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTER SIMULATION; DIFFUSION IN SOLIDS; ION IMPLANTATION; MONTE CARLO METHODS; SEMICONDUCTOR DOPING;

FRONT-END PROCESS SIMULATION;

INTEGRATED CIRCUIT MANUFACTURE;

EID: 0033904859     PISSN: 00381101     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0038-1101(99)00283-X     Document Type: Article

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