Aligned pipe arrays formation by silicon anodic etching

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 16, Issue 4, 1998, Pages 2105-2109

  Dos Santos, M C ^a   Teschke, O ^a  

^a UNIVERSITY OF CAMPINAS   (Brazil)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0343167237     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.590136     Document Type: Article

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