Current transient analysis of the oxidizing process in the complete anodic regime of the Si-HF system

Materials Science and Engineering B: Solid-State Materials for Advanced Technology

Volumn 69, Issue , 2000, Pages 188-193

  Hasse, G ^a   Carstensen, J ^a   Popkirov, G ^a   Foil, H ^a  

^a UNIVERSITY OF KIEL   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

CURRENT VOLTAGE CHARACTERISTICS; ELECTROCHEMISTRY; ELECTRODES; OXIDATION; POROUS SILICON; REACTION KINETICS; TRANSIENTS;

CURRENT TRANSIENT ANALYSIS;

SEMICONDUCTING SILICON;

EID: 0033874836     PISSN: 09215107     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0921-5107(99)00259-7     Document Type: Article

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