Transmission electron microscopy investigations of the formation of macropores in n- and p-Si(001)/(111)

Materials Science and Engineering B: Solid-State Materials for Advanced Technology

Volumn 69, Issue , 2000, Pages 199-204

  Jager C ^a   Finkenberger, B ^a   Jager W ^a   Christophersen, M ^a   Carstensen, J ^a   Foil, H ^a  

^a UNIVERSITY OF KIEL   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

DISSOLUTION; ELECTROCHEMISTRY; ELECTROLYTES; ETCHING; INTERFACES (MATERIALS); MORPHOLOGY; NUCLEATION; POROUS SILICON; TRANSMISSION ELECTRON MICROSCOPY;

HIGH RESOLUTION TRANSMISSION ELECTRON MICROSCOPY; SILICON ELECTROCHEMISTRY;

SILICON WAFERS;

EID: 0343457948     PISSN: 09215107     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0921-5107(99)00264-0     Document Type: Article

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