InP-based MOEMS and related topics

Journal of Micromechanics and Microengineering

Volumn 10, Issue 2, 2000, Pages 287-292

  Leclercq, Jean Louis ^a   Garrigues, Michel ^a   Letartre, Xavier ^a   Seassal, Christian ^a   Viktorovitch, Pierre ^a  

^a ECOLE CENTRALE DE LYON   (France)

Author keywords

[No Author keywords available]

Indexed keywords

HETEROJUNCTIONS; METALLORGANIC VAPOR PHASE EPITAXY; MICROELECTROMECHANICAL DEVICES; MICROMACHINING; MOLECULAR BEAM EPITAXY;

MICROMECHANICS; MICROOPTOELECTROMECHANICAL SYSTEMS;

SEMICONDUCTING INDIUM PHOSPHIDE;

EID: 0033706836     PISSN: 09601317     EISSN: None     Source Type: Journal    
DOI: 10.1088/0960-1317/10/2/331     Document Type: Article

References (14)

1. Hjort K, Streubel K and Viktorovitch P 1996 Optical MEMS and their applications Invited Paper at Indium Phosphide Based Micro OptoElectro Mechanics, IEEE/LEOS Summer Topicals'96 (Keystone, CO, 7-9 August 1996)
2. Seassal C, Leclercq J L and Viktorovitch P 1996 Fabrication of InP-based freestanding microstructures by selective surface micromachining J. Micromech. Microeng. 6 261-5
3. Spisser A, Regreny P, Seassal C, Leclercq J L and Viktorovitch P 1999 Fabrication of multi-air gaps InP based microstructures for widely tunable optical filters Symp. on Design, Test and Microfabrication of MEMS and MOEMS (Paris, 30 March-1 April 1999) (SPIE vol 3680) pp 622-30
4. Leclercq J L, Viktorovitch P, Letartre X, Nuban M F, Gendry M, Benyattou T, Guillot G, Fierling G and Priester C 1995 Lateral band gap modulation by controlled elastic relaxation of strained multiquantum well structures on InP Appl. Phys. Lett. 67 1301-3
5. Hjort K 1996 Sacrificial etching of III-V compounds for micromechanical devices J. Micromech. Microeng. 6 370-5
6. Collins S D 1997 Etch stop techniques for micromachining J. Electrochem. Soc. 144 2242-62
7. Greek S, Seassal C, Viktorovitch P and Hjort K 1999 The strength of surface micromachined indium phosphide devices evaluated by Weibull analysis of tensile and bending tests Sensors Mater. 11 247-56
8. Viktorovitch P, Leclercq J L, Letartre X, Benyattou T, Greek S, Hjort K, Chitica N and Daleiden J 1998 Tunable microcavity based on III-V semiconductor micro-opto-electro-mechanical structures (MOEMS) with strong optical confinement Invited Paper at MOEMS'98 Int. Conf. on Optical MEMS and their Applications (Monterey, USA, 20-24 July, 1998)
9. Daleiden J et al 1999 Tunable InP/air gap Fabry-Pérot filter for wavelength division multiplexing fiber optical transmission Proc. 11th Int. Conf. on Indium Phosphide and Related Materials (Davos, Switzerland, 16-20 May)
10. Brown A S 1998 Compliant substrate technology: status and prospects J. Vac. Sci. Technol. B 16 2308-12
11. Jourba S et al 1999 2 μm resonant cavity enhanced InP/InGaAs single quantum well photodetector Electron. Lett. 35 1272-3
12. 0.25 fractional monolayer superlattices Appl. Phys. Lett. 75 220-2
13. Lee R K, Painter O J, D'Urso B, Scherer A and Yariv A 1999 Measurement of spontaneous emission from a two-dimensional photonic band gap defined microcavity at near infrared wavelength Appl. Phys. Lett. 74 1522-4
14. Pottier P et al 1999 Triangular and hexagonal high Q-factor 2D photonic bandgap cavities on III-V suspended membranes (Special section on Electromagnetic Crystal Structures, Design, Synthesis & Applications) J. Lightwave Technol. 17 2058-62