Fabrication of multi-air gaps InP based microstructures for widely tunable optical filters

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3680, Issue II, 1999, Pages 622-631

  Spisser, Alain ^a   Regreny, Philippe ^a   Seassal, Christian ^a   Leclercq, Jean Louis ^a   Viktorovitch, Pierre ^a  

^a ECOLE CENTRALE DE LYON   (France)

Author keywords

[No Author keywords available]

Indexed keywords

ANISOTROPY; COMPUTER SIMULATION; CONSTRAINT THEORY; ETCHING; MICROELECTROMECHANICAL DEVICES; MICROMACHINING; MICROSTRUCTURE; OPTICAL FILTERS; OPTIMIZATION; RESIDUAL STRESSES; SEMICONDUCTING INDIUM PHOSPHIDE;

FABRY-PEROT FILTERS; MICROOPTOELECTROMECHANICAL SYSTEMS (MOEMS); MULTI-AIR GAPS MICROSTRUCTURES;

INTEGRATED OPTOELECTRONICS;

EID: 0032625870     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Article

References (15)