Optical methods for micromachine monitoring and feedback

Sensors and Actuators, A: Physical

Volumn 78, Issue 2, 1999, Pages 220-235

  Dickey, Fred M ^a   Holswade, Scott C ^a   Hornak, Lawrence A ^b   Brown, Kolin S ^b  

^a SANDIA NATIONAL LABORATORIES   (United States)

^b West Virginia University   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ACTUATORS; MICROMACHINING; SEMICONDUCTING SILICON;

MICROMACHINE OPTICAL PROBE (MOP);

MICROELECTROMECHANICAL DEVICES;

EID: 0033364721     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(99)00207-1     Document Type: Article

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