Modeling an optical micromachine probe

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3173, Issue , 1997, Pages 345-356

  Mittas, Anthony ^a   Dickey, Fred M ^a   Holswade, Scott C ^a  

^a SANDIA NATIONAL LABORATORIES   (United States)

Author keywords

Micromachines; Optical modeling; Optical probe; Performance analysis

Indexed keywords

COMB DRIVES; EXPERIMENTAL DATUMS; LONG TERMS; MANUFACTURING TECHNIQUES; MICROMACHINES; OPTICAL MODELING; OPTICAL PROBE; OPTICAL TECHNIQUES; OPTICAL-; OPTIMIZE DESIGNS; PERFORMANCE ANALYSIS; ROTATION RATES; SANDIA NATIONAL LABORATORIES; STATISTICAL PERFORMANCES; SYSTEM APPLICATIONS; TRANSIENT RESPONSES;

COMPOSITE MICROMECHANICS; HIGH SPEED CAMERAS; MACHINING; MEASUREMENTS; OPTICAL ENGINEERING; PHOTOGRAPHY; ROTATION;

HIGH SPEED PHOTOGRAPHY;

EID: 0005438162     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.294528     Document Type: Conference Paper

References (2)

1. J. J. Sniegowski and E. J. Garcia, "Microfabricated Actuators and Their Application to Optics", Proceedings SPIE Miniaturized Systems with Micro-Optics and Micromechanics, Vol. 2383. San Jose, CA, February 7-9, pp. 46-64, 1995.
2. F. M. Dickey, S. C. Holswade, N. F. Smith, S. L. Miller, "An Optical Probe For Micromachine Performance Analysis", SPIE Proceedings, Vol. 3008. San Jose, CA, February 10, 1997.