Optical measurement of LIGA milliengine performance

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3276, Issue , 1998, Pages 28-36

  Dickey, Fred M ^a   Holswade, Scott C ^a   Christenson, Todd R ^a   Garcia, Ernest J ^a   Polosky, Marc A ^a  

^a SANDIA NATIONAL LABORATORIES   (United States)

Author keywords

Actuators; Micromachines; Optical probe feedback

Indexed keywords

MICROACTUATORS; MICROMACHINING; OPTICAL FIBERS; OPTICAL WAVEGUIDES;

MILLIENGINES; OPTICAL PROBES;

INTEGRATED OPTICS;

EID: 0032225657     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.302397     Document Type: Conference Paper

References (10)

1. Micromechanics via X-Ray assisted processing
2. Fabrication of microstructures with high aspect ratios and great structural heights by synchrotron radiation lithography, galvanoformung, and plastic moulding (LIGA process)
3. Design and fabrication of a LIGA milliengine
4. Surface micromachined microengine
5. Advanced micromechanisms in a mult-level polysilicon technology
6. Design and testing of planar magnetic micromotors fabricated by deep X-ray lithoraphy and electroplating
7. LIGA-microtesting system with integrated strain gauges for force measurement
8. An optical probe for micromachine performance analysis
9. Modeling of an optical micromachine probe
10. Optical measurement of micromachine engine performance