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Volumn 3008, Issue , 1997, Pages 124-135
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Polymer guided wave integrated optics: An enabling technology for micro-opto-electro-mechanical systems
a a a a |
Author keywords
MEMS; MOEMS; Optical polymers; Optical waveguides; Polymer waveguides
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Indexed keywords
DISPLAY DEVICES;
INTEGRATED OPTICS;
MICROELECTROMECHANICAL DEVICES;
MICROELECTRONIC PROCESSING;
MICROMACHINING;
MICROOPTICS;
OPTICAL VARIABLES MEASUREMENT;
ORGANIC POLYMERS;
STATE FEEDBACK;
SURFACE TREATMENT;
OPTICAL POLYMERS;
POLYMER WAVEGUIDES;
OPTICAL WAVEGUIDES;
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EID: 0031350277
PISSN: 0277786X
EISSN: None
Source Type: Conference Proceeding
DOI: 10.1117/12.271407 Document Type: Conference Paper |
Times cited : (6)
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References (17)
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