Silicon mirrors and micromirror arrays for spatial laser beam modulation

International Conference on Solid-State Sensors and Actuators, Proceedings

Volumn 1, Issue , 1997, Pages 81-84

  Doetzel, Wolfram ^a   Gessner, Thomas ^a   Hahn, Ramon ^a   Kaufmann, Christian ^a   Kehr, Kersten ^a   Kurth, Steffen ^a   Mehner, Jan ^a  

^a CHEMNITZ UNIVERSITY OF TECHNOLOGY   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

COMPOSITE MICROMECHANICS; COMPUTER SIMULATION; CRYSTALLINE MATERIALS; LASER BEAMS; LIGHT MODULATION; SILICON ON INSULATOR TECHNOLOGY;

MICROMIRROR ARRAYS; SILICON MIRRORS;

MIRRORS;

EID: 0030691578     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (7)