Dynamical mapping and end-point detection of photoresist development by using plastic-fiber-bundle probe array

IEEE Transactions on Instrumentation and Measurement

Volumn 48, Issue 6, 1999, Pages 1319-1323

  Lin, Gong Ru ^a  

^a TATUNG UNIVERSITY   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

DISSOLUTION; ELLIPSOMETRY; ETCHING; INTEGRATED CIRCUIT MANUFACTURE; INTERFEROMETRY; LIGHT SOURCES; OPTICAL FIBERS; PROBES; SEMICONDUCTING FILMS; SILICON WAFERS;

DYNAMICAL MAPPING; END POINT DETECTION; PHOTORESIST FILM; PLASTIC FIBER BUNDLE PROBE ARRAY;

PHOTORESISTS;

EID: 0033314635     PISSN: 00189456     EISSN: None     Source Type: Journal    
DOI: 10.1109/19.816155     Document Type: Article

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