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Volumn 64, Issue 6, 1974, Pages 804-811
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DESIGN AND OPERATION OF AN AUTOMATED, HIGH-TEMPERATURE ELLIPSOMETER.
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NONE
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Author keywords
[No Author keywords available]
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Indexed keywords
OPTICAL INSTRUMENTS;
SEMICONDUCTING SILICON COMPOUNDS;
ELLIPSOMETERS;
FILMS;
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EID: 0016072925
PISSN: None
EISSN: None
Source Type: Journal
DOI: 10.1364/JOSA.64.000804 Document Type: Article |
Times cited : (97)
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References (18)
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