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Volumn 70, Issue 2, 1999, Pages 1518-1521
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Real-time and multipoint monitoring the dissolution rate of photoresist film by using a novel plastic optical fiber bundle
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Author keywords
[No Author keywords available]
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Indexed keywords
DETECTORS;
DISSOLUTION;
ELLIPSOMETRY;
LIGHT INTERFERENCE;
LIGHT SOURCES;
NUMERICAL METHODS;
OPTICAL FIBERS;
PHOTORESISTS;
PLASTICS;
SILICON WAFERS;
THICKNESS MEASUREMENT;
THIN FILMS;
DISSOLUTION RATE;
PHOTORESIST FILM;
PLASTIC OPTICAL FIBER BUNDLE;
INTERFEROMETERS;
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EID: 0033070925
PISSN: 00346748
EISSN: None
Source Type: Journal
DOI: 10.1063/1.1149617 Document Type: Article |
Times cited : (5)
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References (13)
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