메뉴 건너뛰기




Volumn 70, Issue 2, 1999, Pages 1518-1521

Real-time and multipoint monitoring the dissolution rate of photoresist film by using a novel plastic optical fiber bundle

Author keywords

[No Author keywords available]

Indexed keywords

DETECTORS; DISSOLUTION; ELLIPSOMETRY; LIGHT INTERFERENCE; LIGHT SOURCES; NUMERICAL METHODS; OPTICAL FIBERS; PHOTORESISTS; PLASTICS; SILICON WAFERS; THICKNESS MEASUREMENT; THIN FILMS;

EID: 0033070925     PISSN: 00346748     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1149617     Document Type: Article
Times cited : (5)

References (13)


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.