Stresses in multilayered thin films

MRS Bulletin

Volumn 24, Issue 2, 1999, Pages 34-38

  Cammarata, Robert C ^a   Bilello, John C ^a   Greer, A Lindsay ^a   Sieradzki, Karl ^a   Yalisove, Steven M ^a  

^a NONE

Author keywords

[No Author keywords available]

Indexed keywords

DISSIMILAR MATERIALS; INTERFACES (MATERIALS); RESIDUAL STRESSES; STRAIN; STRESS ANALYSIS; THERMAL STRESS; THIN FILMS;

DOUBLE-CRYSTAL DIFFRACTION TOPOGRAPHY; GRAZING INCIDENCE X-RAY SCATTERING;

MULTILAYERS;

EID: 0033076435     PISSN: 08837694     EISSN: None     Source Type: Journal    
DOI: 10.1557/S0883769400051526     Document Type: Article

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