-
15
-
-
0018064179
-
-
Pergamon Press, New York, 1978
-
2 and its interfaces. (Pergamon Press, New York, 1978), 1978. p. 333.
-
(1978)
2 and Its Interfaces
, pp. 333
-
-
Herman, F.1
Batra, I.P.2
Kasowski, R.V.3
Pantelides, S.T.4
-
26
-
-
0018153846
-
-
Pergamon, New York, 1978
-
2 and its interfaces. (Pergamon, New York, 1978), 1978. p. 366.
-
(1978)
2 and Its Interfaces
, pp. 366
-
-
Helms, C.R.1
Johnson, N.M.2
Schwarz, S.A.3
Spicer, W.E.4
Pantelides, S.T.5
-
27
-
-
0018522041
-
-
Grunthaner FJ, Grunthaner PJ, Vasquez RP, Lewis BF, Maserjian J. J Vac Sci Technol 1979;16:1443.
-
(1979)
J Vac Sci Technol
, vol.16
, pp. 1443
-
-
Grunthaner, F.J.1
Grunthaner, P.J.2
Vasquez, R.P.3
Lewis, B.F.4
Maserjian, J.5
-
40
-
-
84903381773
-
-
submitted
-
Eng J, Jr, Raghavachari K, Struck LM, Chabal YJ, Bent BE, Banaszak Holl MM, McFeely FR, Michaels AM, Flynn GW, Christman SB, Chaban EE, Williams GP, Radermacher K, Mantl S. J Chem Phys (submitted).
-
J Chem Phys
-
-
Eng J., Jr.1
Raghavachari, K.2
Struck, L.M.3
Chabal, Y.J.4
Bent, B.E.5
Banaszak Holl, M.M.6
McFeely, F.R.7
Michaels, A.M.8
Flynn, G.W.9
Christman, S.B.10
Chaban, E.E.11
Williams, G.P.12
Radermacher, K.13
Mantl, S.14
-
46
-
-
0024732464
-
-
Gerardi GJ, Poindexter EH, Caplan PJ, Harmatz M, Buchwald WR, Johnson NM. J Electrochem Soc 1989;136:2609.
-
(1989)
J Electrochem Soc
, vol.136
, pp. 2609
-
-
Gerardi, G.J.1
Poindexter, E.H.2
Caplan, P.J.3
Harmatz, M.4
Buchwald, W.R.5
Johnson, N.M.6
-
50
-
-
0000591696
-
-
Feldman LC, Silverman PJ, Williams JS, Jackman TE, Stensgaard I. Phys Rev Lett 1978;41:1396.
-
(1978)
Phys Rev Lett
, vol.41
, pp. 1396
-
-
Feldman, L.C.1
Silverman, P.J.2
Williams, J.S.3
Jackman, T.E.4
Stensgaard, I.5
-
52
-
-
0345024108
-
-
Electrochemical Society, Pennington, NJ, 1997
-
Stathis JH, Cartier E, Edwards H, Poindexter EH. M. J. Deen, W. D. Brown, K. B. Sundaram, S. I. Raider, editors. Silicon nitride and silicon dioxide thin insulating films IV. (Electrochemical Society, Pennington, NJ, 1997), 1997.
-
(1997)
Silicon Nitride and Silicon Dioxide Thin Insulating Films IV
-
-
Stathis, J.H.1
Cartier, E.2
Edwards, H.3
Poindexter, E.H.4
Deen, M.J.5
Brown, W.D.6
Sundaram, K.B.7
Raider, S.I.8
-
54
-
-
0000839383
-
-
Cantin JL, Schoisswohl M, von Bardeleben HJ, Zoubir NH, Vergnat M. Phys Rev 1995;B52:11599.
-
(1995)
Phys Rev
, vol.B52
, pp. 11599
-
-
Cantin, J.L.1
Schoisswohl, M.2
Von Bardeleben, H.J.3
Zoubir, N.H.4
Vergnat, M.5
-
57
-
-
0032097083
-
Boron diffusion in silicon oxides and oxynitrides
-
Ellis KA, Buhrman RA. Boron diffusion in silicon oxides and oxynitrides. J Electrochem Soc 1998;145:2068.
-
(1998)
J Electrochem Soc
, vol.145
, pp. 2068
-
-
Ellis, K.A.1
Buhrman, R.A.2
-
60
-
-
0000090633
-
-
Aoyama T, Suzuki K, Tashiro H, Toda Y, Yamazaki T, Takasaki K, Ito T. J Appl Phys 1995;77:417.
-
(1995)
J Appl Phys
, vol.77
, pp. 417
-
-
Aoyama, T.1
Suzuki, K.2
Tashiro, H.3
Toda, Y.4
Yamazaki, T.5
Takasaki, K.6
Ito, T.7
-
61
-
-
85031623690
-
-
The Electrochemical Society, Pennington, NJ, 1997
-
Navi M, Dunham S. M. J. Deen, W. D. Brown, S. I. Raider, K. Sundaram, editors. Silicon nitride and silicon dioxide thin insulating films IV. (The Electrochemical Society, Pennington, NJ, 1997), 1997.
-
(1997)
Silicon Nitride and Silicon Dioxide Thin Insulating Films IV
-
-
Navi, M.1
Dunham, S.2
Deen, M.J.3
Brown, W.D.4
Raider, S.I.5
Sundaram, K.6
|