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Volumn 222, Issue , 1997, Pages 33-41
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Theory of defects and defect processes in silicon dioxide
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Author keywords
[No Author keywords available]
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Indexed keywords
COMPUTATIONAL METHODS;
DEFECTS;
DIFFUSION IN SOLIDS;
ELECTRONIC STRUCTURE;
HYDROGEN;
MATHEMATICAL MODELS;
MOS DEVICES;
NITROGEN;
THIN FILMS;
ATOMIC RELAXATIONS;
SILICA;
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EID: 0031550083
PISSN: 00223093
EISSN: None
Source Type: Journal
DOI: 10.1016/S0022-3093(97)00350-5 Document Type: Article |
Times cited : (19)
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References (36)
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