Wear resistant fluorinated diamondlike carbon films

New Diamond and Frontier Carbon Technology

Volumn 6, Issue 1, 1996, Pages 13-21

  Grill, Alfred ^a   Patel, Vishnubhai V ^a  

^a IBM T J WATSON RESEARCH CENTER   (United States)

Author keywords

DLC; Fluorinated diamondlike carbon; Precursor dilution; Wear

Indexed keywords

EID: 3142645596     PISSN: 13449931     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

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