Structural and compositional characterization of 6H-SiC implanted with N+ and Al+ ions using optical methods

Diamond and Related Materials

Volumn 8, Issue 2-5, 1999, Pages 346-351

  Pezoldt, J ^a   Yankov, R A ^a,b   Werninghaus, T ^c   Zahn, D R T ^c   Fukarek, W ^d   Teichert, G ^a   Luebbe, M ^c   Skorupa, W ^d  

^a ILMENAU UNIVERSITY OF TECHNOLOGY   (Germany)

^b CCR GmbH   (Germany)

^c CHEMNITZ UNIVERSITY OF TECHNOLOGY   (Germany)

^d INSTITUTE OF ION BEAM PHYSICS AND MATERIALS RESEARCH   (Germany)

Author keywords

Infra red reflection spectroscopy; Ion beam synthesis; Optical characterization; Phase transitions; Photothermal spectroscopy; Raman spectroscopy

Indexed keywords

ALUMINUM; ALUMINUM COMPOUNDS; CRYSTAL STRUCTURE; INFRARED SPECTROSCOPY; ION BEAMS; ION IMPLANTATION; LIGHT POLARIZATION; NITROGEN; PHASE TRANSITIONS; RAMAN SPECTROSCOPY; SILICON CARBIDE; SYNTHESIS (CHEMICAL);

ALUMINUM NITRIDE; PHOTOTHERMAL SPECTROSCOPY;

SOLID SOLUTIONS;

EID: 0032607243     PISSN: 09259635     EISSN: None     Source Type: Journal    
DOI: 10.1016/s0925-9635(98)00307-0     Document Type: Article

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