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Journal of Non-Crystalline Solids

Volumn 220, Issue 2-3, 1997, Pages 187-194

Infrared and Raman spectroscopy of particle-beam induced damage of silicon carbide

(5) Hobert, H a Dunken, H a Menzel, R a Bachmann, T a Wesch, W a

a FRIEDRICH SCHILLER UNIVERSITY JENA (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

CARBON; CRYSTAL LATTICES; DIELECTRIC PROPERTIES OF SOLIDS; INFRARED SPECTROSCOPY; INTERFACES (MATERIALS); ION BEAMS; ION BOMBARDMENT; ION IMPLANTATION; LIGHT ABSORPTION; RAMAN SPECTROSCOPY; REFRACTIVE INDEX; SILICON;

ION BEAM INDUCED DAMAGE;

SILICON CARBIDE;

EID: 0031272980 PISSN: 00223093 EISSN: None Source Type: Journal
DOI: 10.1016/S0022-3093(97)00305-0 Document Type: Article

Times cited : (23)

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