Spiral inductors on silicon - Status and trends (invited article)

International Journal of RF and Microwave Computer-Aided Engineering

Volumn 8, Issue 6, 1998, Pages 422-432

  Burghartz, Joachim N ^a,b,c,d  

^a IBM T J WATSON RESEARCH CENTER   (United States)

^b RWTH AACHEN UNIVERSITY   (Germany)

^c UNIVERSITY OF STUTTGART   (Germany)

^d IBM   (United States)

Author keywords

Inductor; Microwave; Multilayer interconnects; Passive components; RF; Silicon; Spiral inductor

Indexed keywords

ELECTRIC INDUCTORS; INTERCONNECTION NETWORKS; MICROWAVE DEVICES; MULTILAYERS; RADIO EQUIPMENT; SUBSTRATES;

SPIRAL INDUCTORS;

SILICON ON INSULATOR TECHNOLOGY;

EID: 0032206077     PISSN: 10964290     EISSN: None     Source Type: Journal    
DOI: 10.1002/(SICI)1099-047X(199811)8:6<422::AID-MMCE3>3.0.CO;2-K     Document Type: Article

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