Comparison of microwave inductors fabricated on silicon-on-sapphire and bulk silicon

IEEE Microwave and Guided Wave Letters

Volumn 6, Issue 9, 1996, Pages 323-325

  Johnson, R A ^a,b   Chang, C E ^a,c,e   Asbeck, P M ^a,b   Wood, M E ^d   Garcia, G A ^d   Lagnado, I ^a,d  

^a IEEE

^b UNIVERSITY OF CALIFORNIA   (United States)

^c UNIVERSITY OF CALIFORNIA   (United States)

^d RDT and E Division   (United States)

^e ROCKWELL SCIENCE CENTER   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

DIELECTRIC MATERIALS; INTEGRATED CIRCUIT MANUFACTURE; MICROWAVE INTEGRATED CIRCUITS; NATURAL FREQUENCIES; SEMICONDUCTING SILICON; SEMICONDUCTOR DEVICE MODELS; SILICON ON SAPPHIRE TECHNOLOGY; SUBSTRATES;

DIELECTRIC SUBSTRATE; QUALITY FACTORS;

ELECTRIC INDUCTORS;

EID: 0030241682     PISSN: 10518207     EISSN: None     Source Type: Journal    
DOI: 10.1109/75.535833     Document Type: Review

References (9)

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2. P. R. de la Houssaye et al., "Microwave performance of optically fabricated T-gate thin film silicon-on-sapphire based MOSFET's," IEEE Electron Device Lett., vol. 16, no. 6, p. 289, June 1995.
3. J. Y.-C. Chang et al., "Large suspended inductors on silicon and their use in a 2-μm CMOS RF amplifier," IEEE Electron Device Lett., vol. 14, no. 5, pp. 246-248, May 1993.
4. C.-Y. Chi and G. M. Rebeiz, "Planar millimeter-wave microstrip lumped elements using micro-machining techniques," in IEEE MTT-S Dig., 1994, pp. 657-660.
5. D. Lovelace et al., "Silicon MMIC inductor modeling for high volume, low cost applications," Microwave J., Aug. 1994, p. 60.
6. K. B. Ashby et al., "High Q inductors for wireless applications in a complementary silicon bipolar process," in '94 Bipolar/BiCMOS Circuits Tech. Mtg., pp. 179-182.
7. H. M. Greenhouse, "Design of planar rectangular microelectronic inductors," IEEE Trans. Parts, Hybrids Packag., vol. PHP-10, no. 2, pp. 101-109, June 1974.
8. F. S. Burkett, Jr., "Improved design for thin film inductors," in Proc. '71 Electron. Comp. Conf., Washington, DC, 1971, pp. 183-193.
9. H. A. Wheeler, "Simple inductance formulas for radio coils," in Proc. Inst. Radio Eng.. XVI, Oct. 1928, pp. 1398-1400.