InP-based micro-mechanical tunable and selective photodetector for WDM systems

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3008, Issue , 1997, Pages 62-67

  Seassal, C ^a   Leclercq, J L ^a   Letartre, X ^a   Gagnaire, A ^a   Gendry, M ^a   Viktorovitch, P ^a   Laine J P ^a   Sidoroff, F ^a   Ledantec, R ^a   Miu, C ^a   Benyattou, T ^a   Guillot, G ^a   Rondi, D ^a   Blondeau, R ^a  

^a ECOLE CENTRALE DE LYON   (France)

Author keywords

Fabry Perot tunable filter; Micromachining; MOEMS; RCE photodetectors; Wavelength Division Multiplexing system

Indexed keywords

CAVITY RESONATORS; FABRY-PEROT INTERFEROMETERS; LIGHT ABSORPTION; MICROOPTICS; OPTICAL FILTERS; OPTICAL SYSTEMS; OPTOELECTRONIC DEVICES; QUANTUM EFFICIENCY; SEMICONDUCTING INDIUM PHOSPHIDE; TUNING; WAVELENGTH DIVISION MULTIPLEXING;

PHOTONIC DEVICES;

PHOTODETECTORS;

EID: 0031350216     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.271441     Document Type: Conference Paper

References (8)

1. Widely and continuously tunable micromachined resonant cavity detector with wavelength tracking
2. 1.26 μm vertical cavity laser with two InP air-gap reflectors
3. Frabication of InP based microstructures by selective surface micromachining
4. Sacrificial etching of III-V compounds for micromechanical devices
5. Electrostatic parallelogram actuators
6. Micromachined structures for vertical microelectrooptical devices on InP
7. Resonant cavity enhanced photonic devices