InP-based micro machined Mach-Zehnder interferometer stress sensors

Microsystem Technologies

Volumn 3, Issue 3, 1997, Pages 139-144

  Seassal, C ^a   Leclercq, J L ^a   Fierling, G ^a   Letartre, X ^a   Gendry, M ^a   Viktorovitch, P ^a   Bertic, Y ^b   Trouillet, A ^b   Cachard, A ^b   Benech, P ^c   Laine J P ^d   Sidoroff, F ^d  

^a ECOLE CENTRALE DE LYON   (France)

^b UNIVERSITÉ JEAN MONNET   (France)

^c CNRS   (France)

^d LABORATOIRE DE TRIBOLOGIE ET DYNAMIQUE DES SYSTÈMES   (France)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0042280492     PISSN: 09467076     EISSN: None     Source Type: Journal    
DOI: 10.1007/s005420050071     Document Type: Article

References (14)

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