Sub-quarter micron silicon integrated circuits and single wafer processing

Microelectronics Reliability

Volumn 38, Issue 9, 1998, Pages 1471-1483

  Singh, R ^a  

^a AMRL   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

INTEGRATED CIRCUIT MANUFACTURE; LEAKAGE CURRENTS; LITHOGRAPHY; MICROELECTRONIC PROCESSING; OPTIMIZATION; RELIABILITY; SILICON WAFERS; THERMAL STRESS;

SINGLE WAFER PROCESSING; SUB QUARTER MICRON SILICON INTEGRATED CIRCUITS;

INTEGRATED CIRCUITS;

EID: 0032156785     PISSN: 00262714     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0026-2714(98)00052-3     Document Type: Article

References (26)

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