A cylindrical micro ultrasonic motor using pzt thin film deposited by single process hydrothermal method (0 2.4 mm, l -10 mm stator transducer)

IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control

Volumn 45, Issue 5, 1998, Pages 1178-1187

  Morita, Takeshi ^a   Kurosawa, Minoru Kuribayashi ^a   Higuchi, Toshiro ^a  

^a UNIVERSITY OF TOKYO   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

DEPOSITION; ELECTRIC POTENTIAL; LEAD COMPOUNDS; PIEZOELECTRICITY; SPEED; STATORS; SUBSTRATES; THIN FILMS; TITANIUM; TORQUE MEASUREMENT; TRANSDUCERS; ULTRASONIC DEVICES;

HYDROTHERMAL METHOD; LEAD ZIRCONATE TITANATE; MICRO ULTRASONIC MOTOR;

ELECTRIC MOTORS;

EID: 0032155478     PISSN: 08853010     EISSN: None     Source Type: Journal    
DOI: 10.1109/58.726441     Document Type: Article

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