SCOPUS 정보 검색 플랫폼

"Sensors and Actuators, A: Physical"

Volumn 48, Issue 2, 1995, Pages 157-165

Fabrication and characterization of PZT thin-film vibrators for micromotors

(7) Muralt, P a Kohli, M a Maeder, T a Kholkin, A a Brooks, K a Setter, N a Luthier, R b

a Federal Institute of Technology (Switzerland)

b ASULAB (Switzerland)

Author keywords

Micromotors; Piezoelectrics; PZT; Thin film vibrators

Indexed keywords

CHARACTERIZATION; FABRICATION; INTERFEROMETRY; LEAD COMPOUNDS; NATURAL FREQUENCIES; PIEZOELECTRIC MATERIALS; SOL-GELS; SPUTTER DEPOSITION; THIN FILM DEVICES; TORQUE; VIBRATIONS (MECHANICAL);

FUNCTIONAL CHARACTERIZATION; LASER INTERFEROMETRY; LEAD ZIRCONATE TITANATE; MEMBRANE DEFLECTION; MICROMOTORS; SILICON STATOR MEMBRANE; STATOR VIBRATION FREQUENCY; THIN-FILM VIBRATORS;

VIBRATORS;

EID: 0029304253 PISSN: 09244247 EISSN: None Source Type: Journal
DOI: 10.1016/0924-4247(95)00994-9 Document Type: Article

Times cited : (180)

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